Yamato PDC210 Plasma Cleaner (500W)

Plasma Mode: RIE (DP mode option)

Electrode structure: Parallel flat stage plate

Vacuum gauge: Capacitance manometer

High frequency output: Max 300W

Oscillation Frequency: 13.56MHz Quartz oscillator

Output setting method: Manual setting on LCD touch panel

Matching method: Auto tuning

Chamber size: W400×D250×H150mm

Stage size: W250×D170mm

Chamber material: Aluminum

Reaction gas: 2 systems (Argon, Oxygen)

Purge gas: Nitrogen or dry air

Reaction gas flow control: Mass flow controller

Rotary vacuum pump: Approx. 345L/min. (Provided)

External dimensions（W×D×H mm）: W540×D600×H600mm

Weight: Approx. 105kg

Power Source: AC220V~AC 415V 3-phase with step-down transformer

Datasheet