Yamato PiPi Plasma Cleaner (RIE)

Plasma mode: RIE (reactive ion etching)

Electrode structure: Parallel flat panel type

Electrode dimensions: W130×D130mm

Vacuum meter: Bourdon gauge

Controller: Sequencer

Matching method: Auto tuning

Internal dimensions（W×D×H mm）: 230×130×100mm

External dimensions（W×D×H mm）: 438×520×565mm

Power Source: 115V /220V Single phase with step-down transformer

Weight: 50kg

Datasheet