Yamato V1000 Plasma Cleaner (1000~2000W)

Plasma Mode: DP/RIE

Oscillation Frequency: 13.56MHz

RF Power: 1,000

Stage Dimensions: 280W×280D mm　Parallel flat stage

Reaction Gas: Mass flow control, 2 system + 1 for purge gas

Vacuum Pump: Included, Approx. 1,000L/min exhaust volume

Safety Device: Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device

Internal dimensions（W×D×H mm）: 400×400×380mm

External dimensions（W×D×H mm）: 700×800×1600mm

Power Source: AC220V~AC 415V 3-phase with step-down transformer

Weight: 1000kg

Datasheet