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Plasma Mode: DP/RIE
Oscillation Frequency: 13.56MHz
RF Power: 1,000W ~ 2,000W
Stage Dimensions: 400W×375D mm, Parallel flat stage plate (Multi)
Reaction Gas: Mass flow control, 2 system + 1 for purge gas
Vacuum Pump: Included, Approx. 1,000L~1500L/min exhaust volume
Safety Device: Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device
Internal dimensions（W×D×H mm）: 600×554×440mm
External dimensions（W×D×H mm）: 900×1000×2040mm
Power Source: AC220V~AC 415V 3-phase with step-down transformer
