Advanced Energy Ascent DMS 40kW 双磁控靶溅射电源系统 (40kW,500Hz~50kHz)

- Input Power: 85 ~ 264 VAC
- Output Voltage: Up to 1000 V
- Output Current: Up to 150 A
- Min Output Current: 1 A at 400 W
- Selectable frequency: 500 Hz ~ 50 kHz
- I/O Communication: Ethernet, EtherCAT®, Profibus®, RS-232/485, analog, Virtual Front Panel (VFP) software, remote control panel, and passive-display front panel
- Weight: ~61.5 kg (136 lb)
- Mounting: 4.26 cm (19”), rack mountable, 6U height
- Cooling Air Temperature: 40°C (104°F) max
- Cooling Water Temperature: 35°C (95°F) max
- Compliance: EU RoHS, CE, NRTL

Detail

Datasheet

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