Advanced Energy Limas RPS LB-4001 Remote Plasma Source (100 ~ 4000W)

- AC Power: 208 VAC nominal, 3 φ, Harting® HAN® 6 HsB, male, 6-pin, 35 A
- AC Line Frequency: 50/60 Hz nominal
- AC Input Current:
20 A max
25 A breaker
- RF Frequency: ≈1.7 ~ 3.0 MHz
- Power: 100 ~ 4000W, continuously adjustable
- Interfaces: Analog (25-pin), RS-232 (AE Bus)
- Cooling Water:
SS female SAE 9/16", 18 straight-thread
1.5 gpm (5.71 lpm) at 35°C (95°F)
- Operating Temperature: +5 ~ +40°C (+41 ~ +104°F)

Detail

Datasheet

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