| 制造商: | ESDEMC |
| Model: | ES62X-CMPS-WPS |
• Wafer Chuck diameter: 170 mm up to 300 mm
• Wafer Chuck Material: Stainless Steel
• Wafer Chuck Bias: 4 mm connector
• Dimensions: 500 X 300 X 100 mm
• Weight: About 14 kg
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