Fcon CUBEMFC-1005NC-KQ2-5L-AR 紧凑型气体流量控制器 (5SLM)

Flow range: 10SCCM~100SLM

Gases: Ar

Valve type: NC: Normally close

Flow rate control range: 5～100％ F.S.(Excluding Mass Flow Meter)

Accuracy: ±2％ F.S [※±1％ F.S Compatible] (Accuracy guaranteed between 15-35℃) 

Setting signal: 0.25～5VDC

Output signal: 0～5VDC

Repeatability: ±0.2％ F.S

Response: Depends on MFC selected.

Operating differential pressure: Depends on MFC selected.

Pressure resistance: 1MPa(G)

Operating temperature: 5-50℃(Accuracy guaranteedbetween 15～35℃), ≦85％RH(No condensation permitted)

Leak integrity: 1×10-7Pa･m3/sec He

Drive power source: 100-240VAC : ≦500mA

Communication: Analog : 0～5VDC

Wetted surface material: SUS316L, PTFE, Fluoro-Rubber

Seal material: Fluoro-Rubber

Actuator system: Thermal

Surface treatment: Machined finish

Standard fitting: One-touch fittings

Accessory: Power cord, User's manual, Written guarantee