Fcon CUBEMFC-1005NC-KQ2-5L-CO2 紧凑型气体流量控制器 (5SLM)
制造商: Fcon Model: CUBEMFC-1005NC-KQ2-5L-CO2 - 联系
Flow range: 10SCCM~100SLM
Gases: CO2
Valve type: NC: Normally close
Flow rate control range: 5~100% F.S.(Excluding Mass Flow Meter)
Accuracy: ±2% F.S [※±1% F.S Compatible] (Accuracy guaranteed between 15-35℃)
Setting signal: 0.25~5VDC
Output signal: 0~5VDC
Repeatability: ±0.2% F.S
Response: Depends on MFC selected.
Operating differential pressure: Depends on MFC selected.
Pressure resistance: 1MPa(G)
Operating temperature: 5-50℃(Accuracy guaranteedbetween 15~35℃), ≦85%RH(No condensation permitted)
Leak integrity: 1×10-7Pa・m3/sec He
Drive power source: 100-240VAC : ≦500mA
Communication: Analog : 0~5VDC
Wetted surface material: SUS316L, PTFE, Fluoro-Rubber
Seal material: Fluoro-Rubber
Actuator system: Thermal
Surface treatment: Machined finish
Standard fitting: One-touch fittings
Accessory: Power cord, User's manual, Written guarantee
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