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Fcon CUBEMFC-1030-KQ2-10L-O2 紧凑型气体流量控制器 (10SLM)

Flow range: 30SLM

Gases: O2

Valve type: NO: Normally open

Flow rate control range: 5~100% F.S.(Excluding Mass Flow Meter)

Accuracy: ±2% F.S [※±1% F.S Compatible] (Accuracy guaranteed between 15-35℃) 

Setting signal: 0.25~5VDC

Output signal: 0~5VDC

Repeatability: ±0.2% F.S

Response: Depends on MFC selected.

Operating differential pressure: Depends on MFC selected.

Pressure resistance: 1MPa(G)

Operating temperature: 5-50℃ (Accuracy guaranteedbetween 15~35℃), ≦85%RH (No condensation permitted)

Leak integrity: 1×10-7Pa・m3/sec He

Drive power source: 100-240VAC: ≦500mA

Communication: Analog: 0~5VDC

Wetted surface material: SUS316L, PTFE, Fluoro-Rubber

Seal material: Fluoro-Rubber

Actuator system: Thermal

Surface treatment: Machined finish

Standard fitting: One-touch fittings

Accessory: Power cord, User's manual, Written guarantee

Details

Datasheet

  • 质量承诺
  • 正品保修
  • 送货到家
  • 交易简单化

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