Mahr MarSurf GD 140 BG 12 粗糙度测量站 (X 140mm, Z 350mm)

Resolution: Measuring range 1: 7.6 nm

                   Measuring range 2: 0.76 nm

Start of traversing length (in X):0 mm

Probe arm length: 45 mm (x 1),67.5 mm (x 1,5),90 mm (x 2),112.5 mm (x 2,5),135 mm (x 3)

End of traversing length (in X):140 mm

350 mm Z-axis

Positioning speed: 0.02 – 200 mm/s (in X)

Guide deviation:0.07 µm / 20 mm,0.2 µm /  60 mm,0.4 µm / 140 mm

Measuring speed: Up to 10 mm/s

Measuring range: 500 µm (±250 µm) for probe arm length 45 mm

                             1500 µm (±750 µm) for probe arm length 135 mm