MITUTOYO Hyper QVWLI 404 光学测量系统 (400×400×240 mm)

Measuring range (X×Y×Z): 

+ Vision measuring area: 400×400×240 mm

+ WLI measuring area*1: 315×400×240 mm

WLI optical head unit: 

+ View field (H×V): 5X lens: approx. 0.64×0.48 mm /10X lens: approx. 0.32×0.24 mm / 25X lens: approx. 0.13×0.10 mm / 50X lens: approx. 0.064×0.048 mm

+ Z repeatability: 2σ≤ 0.08 µm

Vision optical head unit 

+ Observation unit: Programmable power turret 1X-2X-6X

+  Imaging device: B&W CCD (1/2 in)

+ Vision measuring accuracy: E1X, E1Y: (0.8 + 2L/1000) µm; E1Z: (1.5 + 2L/1000) µm; E2XY: (1.4 + 3L/1000) µm