OAI 200IR 桌面正面和背面遮罩对齐器

Substrate Stage:  X, Y Travel: ±10mm

  Z Travel: 1.500 microns

  Micrometer: .001"; .0001"

  Graduations: or .01mm; .001mm

  Rotation: ±3.5˚

Mask: Size: Up to 9" x 9"

Lightsource: Beam Size: Up to 8" square

     Lamp Power: 200, 350, 500, 1.000, and 2.000 Watt NUV 500, 1.000 and 2.000 Watt DUV

Shutter Timer: Timer: 0.1 to 99.0 sec. at 0.1 second increments or 1 to 999 sec. at 1 second increments

Facilities: Electrical: 110 or 220 vac(or other according to Power Supply requirements and Country

    Vacuum 20 - 28” Hg.

    Air and N2 CDA at 60 PSI and N2at 40 PSI

    Exhaust .35” to .5” Water

Dimensions Height: 37” (940mm)

   Width: 31” (788mm)

   Depth: 25” (635mm)

   Shipping Weight: 250 Lbs.