OAI 212 大面积遮罩对齐器

Substrate Size: Up to 12” square or 300mm

Substrate: Stage X, Y Travel: ±10mm

   Z Travel: 5mm

   Micrometer: .001”; .0001”

   Graduations: or .01mm; .001mm

   Rotation: ±3.5˚

Mask: Size: Up to 14” x 14”

Lightsource: Beam Size: Up to 12” square

     Lamp Power: 200, 350, 500, 1.000, and 2.000 Watt NUV 500, 1.000 and 2.000 Watt DUV

Shutter Timer: Timer: 0.1 to 99.0 sec. at 0.1 second increments or 1.0 to 999 sec. at 1.0 second increments

Facilities: Electrical: 110 or 220 vac (or other according to Power Supply requirements and Country)

    Vacuum: 20 - 28” Hg.

    Air and N2: CDA at 60 PSI and N2at 20 PSI

    Exhaust: 0.35” to 0.5” Water

Dimensions: Height: 42” (1067mm)

    Width: 60” (1524mm)

    Depth: 53” (1346mm)