OAI AML 晶圆接合机
制造商: OAI Model: AML - 联系
Unique In-situ alignment system (X,Y,Z & θ)
• Up to 1 micron accuracy manual & Auto alignment
• Full automatic PC control & data acquisition,
• Application of High Voltage up to 2.5KV
• Temperatures up to 560oC,
• Forces up to 25000 to 100000 N
• Self contained dry pumping system (Turbo & back pump) for vacuum up to 10-6 mBar.
• Forced nitrogen cooling.
• 2” to 8” wafers (Depending on model chosen)
• RAD Wafer activation for low T bonding
• Water cooling
Details
- 质量承诺
- 正品保修
- 送货到家
- 交易简单化
