TOB TOB-DSP-1200℃-PECVD-III 滑块式双区 PECVD 系统 (1200℃,4KW,10-1Pa)

Power: 4KW

Furnace tube size(mm): Dia 100(OD) X1800mm

Dimension: 1800X460X660

Power supply voltage: 220V

Phase number: Single-phase

Control mode

1.Yudian temperature control: 30 sections can only use PID temperature regulation.

2.FP93 temperature control (from Japan)

Temperature control mode: Intelligent PID

Burnout protection and display: Yes

Over-temperature protection: Yes

Overcurrent protection: Yes

Control accuracy: +/- 1 ℃

Trigger: Phase-shift trigger

SCR: 106 / 16E Germany Simon Kang

The 1.2 temperature zone max temperature: 1200 ℃

The 1.2 temperature zone Rated temperature: 1150 ℃

Heating rate: ≤30 ℃ / Min (Available upon request modification)

Recommended heating rate: ≤15 ℃ / Min

Thermocouple Type: K type

The 1.2 temperature zone heating length: 205mm

Surrounding surface temperature: ≤45℃

Plasma RF Power

Power output range: 0-500W

Maximum reflected power: 10W

Signal frequency: 13.56MHZ ± 0.005%

Noise: <30 dB

Air cooling: cooling method

Input Power: 208-240V 50 / 60HZ

GX supply system main parameters

Standard range

Proton flow controller 5,10,20,30,50,100,200,300,500SCCM, 1,2,3,5,10SLM

  (you can choose any scale)

Accuracy: ± 1.5%

Pressure drop: <0.01MPa

Repeatability: ± 0.2% F.S

Max Operating pressure: 3MP

VS-0.1 exhaust system

Power supply: 220V / 380V 380W

Pumping rate: 2L / S

Resistance vacuum gauge: ZDR-I

Vacuum measurement range: 0.1-10 5 Pa

Vacuum pump: VRD-8

Corrugated pipe: KF25X1000mm

Vacuum system: 10 -1Pa