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TOB TOB-XY-SC 电容器操作台 (0~-0.1MPa, N,Ag,He)

  • 制造商: TOB
    Model: TOB-XY-SC
    来源: China
    保障: 12 month
    • 报价要求 报价要求
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H2O、  O2: ≤lppm

The leak rate: ≤0.05Vol% h (monthly leakage of oxygen <1L)

Foreline vacuum degree: 0 ~ -0.1MPa (2.5-stage vacuum table)

Case vacuum degree: 0 ~ -0.1MPa (2.5-stage vacuum table)

Transfer chamber can withstand: vacuum degree ≥100Pa

Working gas: nitrogen, argon, helium (purity 99.5%)

Details

Datasheet


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