| 制造商: | ZEISS |
| Model: | MMZ G |
| 来源: | Germany |
Length measurement error MPE_E150 from 2.2 + L/400 μm
Single stylus probing error: MPE_PFTU from 2.0 μ
Scanning probing error:MPE_THP/tau from 2.8 μ / 62 s
Form measuring error: MPE RONt from 2.0 μm
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