IFREE FPT-X4S Single-Sided 4-Probe Flying Probe Tester

Spec:

Min Test Pitch: 20μm

Min Pad Diameter: 50 μm (4-wire probe), 20 μm (2-wire probe)

Number of Arms: 4 Arms (Top: 2, Bottom: 2)

Probe Force: Min. 0.1 g

Probe Rated Stroke: 0.15 mm

Testable Point Type: Pads, test points, etc.

Overall Test Speed: Up to 60 tests/sec (at 0.15 mm travel)

Positioning Repeatability: ±2 μm

Positioning Accuracy: ±5 μm

Product Positioning Method: Universal fixture

Loading & Unloading Method: Manual

Motion Parameters:

Probe retract height: Programmable

Probe soft-landing setting: Programmable

Probe down height setting: Programmable

XYZ driving method: Linear Motor

XYZ Position Feedback: Linear Encoders

XY linear guide: Ultra-Precision Linear Guides

Test Area Description:

Max Testable Size: 350 * 350 mm (12-inch wafer)

Min Testable Size: 50mm*50mm

Substrate Thickness: 1mm~12mm

Test Capability :

DC Constant Current Resistance: 100.0 μΩ ~100.0 kΩ

DC Constant Voltage Resistance: 100.0 Ω ~ 100.0 MΩ

AC Constant Voltage Capacitance: 10.00pF ~ 100.0μF

AC Constant Voltage Inductance: 1.000 μH ~ 1.000 mH

Static Capacitance: 100.0fF ~ 10.00μF

Open Circuit: 4.000 Ω ~ 4.000 MΩ

Short Circuit: 400.0 mΩ ~ 40.00 kΩ

Insulation Resistance: 1.000kΩ~100.0GΩ

High Voltage Resistance: 1.000kΩ~100.0GΩ

Leakage Current: 1.000μA~100.0mA

Precision Resistance Measurement: Kelvin 4-Wire Measurement

Vision Configuration:

Camera Configuration: 2 Monochrome Cameras (Top: 1, Bottom: 1)

Camera Resolution: 12MP

Laser Displacement Sensor: 2 Sets

Others:

Equipment Dimension (L×W×H): L1450 * W1250 * H1350 mm

Weight: 1400kg

Power Supply: 200-240 VAC, 50/60 Hz, 7.7 kVA

Frame: Steel Structure + Marble Base

Operating Environment: Temperature: 25 ℃ ±10 ℃ / Humidity: 30% - 70%

PRODUCT DETAILS

1. Dual-sided 4-arm architecture (Top: 2, Bottom: 2)

2. Automatic QR code recognition

3. Intelligent soft-landing technology

4. High-speed AC CV capacitance measurement

5. Precision Kelvin 4-wire measurement, mark-free probing under 50x magnification

6. High-speed, ultra-precision testing for ceramic and glass substratesProducts Details

1. Dual-sided 4-arm architecture (Top: 2, Bottom: 2)

2. Automatic QR code recognition

3. Intelligent soft-landing technology

4. High-speed AC CV capacitance measurement

5. Precision Kelvin 4-wire measurement, mark-free probing under 50x magnification

6. High-speed, ultra-precision testing for ceramic and glass substrates