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Roundness deviation (µm+µm/mm measuring height)*: 0,01 + 0,0002
Axial runout deviation (µm+µm/mm measuring radius)*: 0,02 + 0,0002
Centering and tilting table: automatic
Table diameter (mm): 180
Table load capacity, centered (N): 200
Speed (rpm) 50 Hz / 60 Hz: 0.1 - 15
Straightness deviation / 100 mm measuring path (µm), Z axis: 0.1
Straightness deviation / total measuring path (µm), Z axis: 0.3
Parallelism deviation Z-/C axis in tracing direction, measuring path (µm): 0.6
Measuring speed (mm/s), Z axis: 0.1-50
Positioning speed (mm/s), Z axis: 0.1-50
Straightness deviation / total measuring path (µm), X axis: 0.3
Perpendicularity X/C axis, measuring path (µm): 0.3
Positioning speed (mm/s), X axis: 0.1-50
Measuring speed (mm/s), X axis: 0.1-50
