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Measuring range:
X-axis 900 mm
Y-axis 1000 mm
Z-axis 600mm
Resolution: 0.0001 mm (0.1 μm)
Guide method: Air bearings on each axis
Drive speed
- CNC MODE: Drive speed 8 - 300mm/s; max. speed: 519 mm/s
- J/S MODE: 0 - 80mm/s (J/S Mode: High Speed); 0 - 3mm/s (J/S Mode: Low Speed); 0.05 mm/s (J/S Mode: Fine Speed)
Max. measuring speed: 8 mm/s
Max. drive acceleration: Each axis: 1,333 mm/s2, max. combined acceleration: 2,309 mm/s2
Workpiece
- Maximum height: 800 mm
- Maximum mass: 1200 kg
Mass (including the control device and installation platform): 2231 kg
Air supply
- Pressure: 0.4 MPa
- Consumption: 60 L/min under normal conditions (air source: 120 L/min)


