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X,Y-axis: 400x200mm (16x8in)
Z-axis: 100mm (4in)
Measuring mode: High-resolution mode and Normal mode
Accuracy(on monitor): 1.5µm (high resolution mode)3µm(normal mode)
Measuring accuracy (U1XY): ±(3.5+0.02L)µm L = measuring length (mm)
Repeatability: 0.7µm (high resolution mode)1µm(normal mode)
CCD Camera: 3 Megapixels,1/2 inch color CCD camera
Optical system: Magnification- 0.2X, double telecentric system
Working distance-90mm
Depth of focus-±0.6mm (high-resolution mode), ±11mm (normal mode)
Illumination: Contour Surface 4-quadrant LED
Stage glass size: 17x9in 440x232mm
Max.loading: 15kg 33lbs
Mass: 340lbs 154kg
Optional accessories
Holder with clamp
V-block with clamp
Swivel center support
Stage adapter sets
Foot switch
