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Measuring range (X × Y × Z): 9.84"x 7.87"x 7.87" (250 × 200 × 200mm)
Variable magnification unit: Programmable Power Turret 1X, 2X, 6X
Resolution / scale unit: 0.1μm / reflective-type linear encoder
CCD camera: B & W
Illumination unit:
Coaxial: White LED
Stage Light: White LED
Vertical reflected: -
Contour: -
Programmable Ring light: White LED
Measuring accuracy:
E1 X / Y axes: (2.0+3L/1000) μm
E1 Z axis: (3.0+5L/1000) μm
E2 X/Y axis: -
TP: E, X-Y-Z plane: (1.7+3L / 1000) μm
QV Objective lenses: 2.5 QV-HR 2.5x QV-SL2.5x
LAF repeatability: σ : 0.4μm
Stage glass size: 12.28"x10.59" (312 × 269mm)
Maximum stage loading: 33 lbs.(15kg)
Dimensions of main unit: 23.07"x33.35"x60.16 "(586×847×1528mm)
Mass of main unit (including mounting stand): 595 lbs.(270 kg)
Optional accessories:
Laser Auto Focus
Rotary Index
