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Measuring range (X × Y × Z): 11.81"x7.87"x7.87" (300 × 200 × 200mm)
Variable magnification unit: Programmable Power Turret 1X, 2X, 6X
Resolution / scale unit: 0.1μm / reflective-type linear encoder
CCD camera: B & W
Illumination unit:
Coaxial: -
Stage Light: -
Vertical reflected: Color LED
Contour: White LED
Programmable Ring light: Color LED
Measuring accuracy:
E1 X / Y axes: (0.8+2L / 1000) μm
E1 Z axis: (1.5+2L / 1000) μm
E2 X/Y axis: (1.4+3L / 1000) μm
TP: E, X-Y-Z plane: (1.7+3L / 1000) μm
QV Objective lenses: 2.5 QV-HR 2.5x QV-SL2.5x
Stage glass size: 15.71"x10.67"(399 × 271mm)
Maximum stage loading: 33 lbs.(15kg)
Dimensions of main unit: 33.82"x37.44"x63.35"(859×951×1609mm)
Mass of main unit (including mounting stand): 794 lbs.(360kg)
Optional accessories:
Laser Auto Focus
Rotary Index
