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Frequency: 1.985 MHz
Frequency Tuning Range: ±10%
Power Output: 5kW, 11kW, 13kW
Accuracy: ±5W up to 500W; ±1% from 501W to max power
Load Impedance Range: Unlimited
Pulse Frequency: Up to 50KHz
Pulse Rise Time: <5 µsec
Pulse Fall Time: <5 µsec
Minimum Pulse Width: 10 µsec
Pulse Energy Repeatability: <3%
Input AC Power200/208: VAC ±10%, 3 Phase, 50/60 Hz
Rated Current: 5 kW: 25 amps max
11 & 13 kW: 55 amps max
RF Connector: SQS standard (QC output)
Interface: Ethernet, RS232
Dimensions: 5 kW: 5.25 x 17.5 x 24.5 inches
11 kW & 13 kW: 8.30 x 17.8 x 25.5 inches (H x W x D)
Compliance: NRTL, CE EMC (EN60204, 61010), SEMI S2, S7, S14, SEMI F47, UL61010
