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Enclosure Dimensions: W x D x H – Footprint: 1068W x 1166D x 1600H; 1966H mm with light Tower (42W x 46D x 63H; 77H in. with Light Tower)
Net Weight: 430 kg (948 lbs.)
Equipment Clearance Right, Left, Back – 254 mm (10 in.), Front – 940 mm (37 in.)
Chamber Maximum Volume: 5.5 liters (338 in³)
Electrodes:
Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power
Working Area: 305W x 305D mm (12W x 12D in.)
RF Power:
Standard Wattage: 600 W
Frequency: 13.56 MHz
Gas Control:
Available Flow Volumes: 50, 100, or 250 sccm
Maximum Number of MFCs: 3
Control System and Interface
Software Control: EPC with PC-based touchscreen interface
Remote Interface: SMEMA, SECS/GEM
Vacuum Pump: Standard Purged Dry Pump: 16 cfm
N2 Purged Pump Flow: 2 slm
