Get exclusive volume discounts, bulk pricing updates, and new product alerts delivered directly to your inbox.
By subscribing, you agree to our Terms of Service and Privacy Policy.
Direct access to our certified experts
Enclosure Dimensions: W x D x H – Footprint: 1405W x 2615D x 1742H mm (55W x 103D x 69H in)
Net Weight: 480 kg (1058 lbs)
Process Module EFEM: 640 kg (1411 lbs)
Effective Footprint –Clearances: Front – 153 mm (6 in), Back – 380 mm (15 in), Left/Right – 775 mm (30.5 in)
Chamber: Maximum Volume: 5.5 liters (338 in³)
Chuck Configurations: 200 mm and 300 mm substrate sizes
Electrodes:
Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power
Working Area: 305W x 305D mm (12W x 12D in.)
RF Power:
Standard Wattage: 600 W
Frequency: 13.56 MHz
Gas Control:
Available Flow Volumes: 50, 100, or 250 sccm
Maximum Number of MFCs: 3
Control System and Interface
Software Control: EPC with PC-based touchscreen interface
Remote Interface: SMEMA, SECS/GEM
Vacuum Pump: Standard Purged Dry Pump: 16 cfm
Optional Purged Dry Pump: 16 cfm
N2 Purged Pump Flow: 2 slm
