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Substrate Stage: X, Y Travel: ±10mm
Z Travel: 1.500 microns
Micrometer: .001"; .0001"
Graduations: or .01mm; .001mm
Rotation: ±3.5˚
Mask: Size: Up to 9" x 9"
Lightsource: Beam Size: Up to 8" square
Lamp Power: 200, 350, 500, 1.000, and 2.000 Watt NUV 500, 1.000 and 2.000 Watt DUV
Shutter Timer: Timer: 0.1 to 99.0 sec. at 0.1 second increments or 1 to 999 sec. at 1 second increments
Facilities: Electrical: 110 or 220VAC (or other according to Power Supply requirements and Country
Vacuum 20 - 28” Hg.
Air and N2 CDA at 60 PSI and N2at 40 PSI
Exhaust 35” to 5” Water
Weight: 250Lbs
Dimensions (H x W x D): 37 x 31 x 25" (940 x 788 x 635mm)
