Get exclusive volume discounts, bulk pricing updates, and new product alerts delivered directly to your inbox.
By subscribing, you agree to our Terms of Service and Privacy Policy.
Direct access to our certified experts
Plasma Mode: RIE (DP mode option)
Electrode structure: Parallel flat stage plate
Vacuum gauge: Capacitance manometer
High frequency output: Max 300W
Oscillation Frequency: 13.56MHz Quartz oscillator
Output setting method: Manual setting on LCD touch panel
Matching method: Auto tuning
Chamber size: W400×D250×H150mm
Stage size: W250×D170mm
Chamber material: Aluminum
Reaction gas: 2 systems (Argon, Oxygen)
Purge gas: Nitrogen or dry air
Reaction gas flow control: Flow meter
Rotary vacuum pump: Approx. 345L/min. (Option)
External dimensions（W×D×H mm）: W540×D600×H600mm
Weight: Approx. 100kg
Power Source: AC115V/AC220V Single phase with step-down transformer
