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Plasma Mode: RIE (DP mode option)
Electrode structure: Parallel flat stage plate
Vacuum gauge: Capacitance manometer
High frequency output: Max 300W
Oscillation Frequency: 13.56MHz Quartz oscillator
Output setting method: Manual setting on LCD touch panel
Matching method: Auto tuning
Chamber size: W400×D250×H150mm
Stage size: W250×D170mm
Chamber material: Aluminum
Reaction gas: 2 systems (Argon, Oxygen)
Purge gas: Nitrogen or dry air
Reaction gas flow control: Mass flow controller
Rotary vacuum pump: Approx. 345L/min. (Provided)
External dimensions（W×D×H mm）: W540×D600×H600mm
Weight: Approx. 105kg
Power Source: AC220V~AC 415V 3-phase with step-down transformer
