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Plasma Mode: RIE/DP selectable
Electrode structure: 3-stage independent parallel flat plates
Vacuum gauge: Capacitance manometer
High frequency output: Max 600W
Oscillation Frequency: 13.56MHz Quartz oscillator
Output setting method: Manual setting on LCD touch panel
Matching method: Auto tuning
Chamber size: W350×D270×H300 mm
Stage size: W250×D220mm Three stages
Chamber material: Aluminum
Reaction gas: 2 systems (Argon, Oxygen)
Purge gas: Nitrogen or dry air
Rotary vacuum pump: Approx. 345L/min. (Provided)
External dimensions（W×D×H mm）: W600×D722×H700 mm
Weight: Approx. 170kg
Power Source: AC220V~AC 415V 3-phase with step-down transformer
Standard accessories: Rotary vacuum pump×1 set, Oilmist eliminator×1 pc, Clamp×3 pcs, Center ring×3 pcs, Flexible tube×1 pc
