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System: DP mode, Barrel type
High Frequency Output: Max. 300W
Oscillation Frequency: 13.56MHz
Tuning Method: Manual biaxial
Reaction Chamber: Pyrex glass, ø118×160mm×1 chamber
Reaction Gas System: 1 system (oxygen), flow meter
Control System: Auto pressure reduction, auto leak valve
Piping Material: SUS、Teflon
Accessory: Vacuum grease×1 pc, O-ring for reaction chamber×1 pc
Internal dimensions（φ×D mm）: φ118×160mm
External dimensions（W×D×H mm）: 438×520×630mm
Power Source: AC115V/AC220V Single phase with step-down transformer
Weight: 34kg
