INFICON UL6000 Fab Leak Detectors

Min. detectable leak rate for helium (vacuum method): <5∙10^-12 mbar∙L/s

Min. detectable leak rate for helium (sniffer mode): <5∙10^-8 mbar∙L/s

Max. inlet pressure (MASSIVE mode): atm. (~1013 mbar)

Type of roughing pump: roots

Max. pumping speed of roughing pump: 36 m³/h

Pumping speed @ inlet (100-1000 mbar): 23 m³/h

Pumping speed @ inlet (10-100 mbar): 26 m³/h

Pumping speed @ inlet (1-10 mbar): 26 m³/h

Max. helium pumping speed (ULTRA mode): >36 L/s

Max. helium pumping speed DN63 reduced to DN40: ~ 30 L/s

Response time for 50 L: 1.4 s

Evacuation time to 1 mbar 50 L: 52 s

Evacuation time to 1 mbar 100 L*: 104 s

Evacuation time to 1 mbar 500 L*: 527 s

Evacuation time to 1 mbar 1000 L*: 1054 s

Venting 50 L to atm.: 16 s

Run up time for operation: <2 min

Time for calibration: <30 s

Inlet flange: DN63 ISO-K

Detectable masses (ULTRATEST Sensor Technology): 2, 3, 4 (H2, 3He, He)

Supply voltage: 100 bis 230 V 50/60 Hz

Max. Power Consumption: 1500 VA

Typ. Power Consumption: 700 VA

Dimensions (l x w x h): 1050 x 472 x 1040 mm

Weight: 143 kg