INFICON Augent OPG550 Optical Plasma Vacuum Gauge

Measurement system: Cold cathode according inverted magnetron principle and thermal conductivity according pirani principle

Measurement range (N2):

1 × 10^-7 ... 1000 mbar

0.75 × 10^-7 ... 750 Torr

Accuracy total pressure reading (N2)

1 × 10^-7 ... 100 mbar: 30% of reading

100 … 1000 mbar: 50% of reading

Repeatability total pressure reading (N2)

1 × 10-7 ... 100 mbar: 5 % of reading

Gas analysis

Measurement system: Optical emission spectroscopy with integrated DC discharge plasma, spectrometer and intelligent electronics

Measurement range (N2): 

1 × 10-7 ... 5 mbar

7.6 × 10-8 ... 3.8 Torr

Detection limit 25 liter chamber

O2 leaks in pressure rise method: ≥0.3 mTorr / min

O2 leaks during pump down from atmosphere with N2 backfill: ≥1 mTorr / min

Sampling frequency: <10 Hz

Typical exposure time: 5 … 1000 ms

Spectral range: 313 … 870 nm

Pressure

Limited to inert gases <50°C: ≤10 bar (absolute)

Temperature

Operation (ambient): +5 ... +50 °C

Storage: -20 ... +70 °C

Bakeout at flange with electronic unit: ≤80 °C

Bakeout at flange w/o electronic unit: ≤120 °C

Relative humidity for 30 days a year: ≤95% (non-condensing)

Supply voltage

At gauge: +14.5 ... +30 V (dc)

Ripple: ≤1 V (p-p)

Power consumption: ≤5 W

Fuse to be connected: ≤1 AT

Output signal

Analog: 0 ... +10 V (dc)

Digital: RS232C

Electrical connection: D-Sub, 9-pin, male

High voltage (in the measuring chamber)

Ignition voltage: ≤4.5 kV

Operating voltage: ≤3.3 kV

Internal volume: ≤46 m3 (2.81 inch3)

Weight: ≤700 g

Dimensions

Footprint: 68 × 68 mm

Height: ≤154 mm

Protection type: IP40

Standards: CE