MKS ELITE-600HA-01 elite™ RF Plasma Generators (600W; 13.56MHz)
Manufacturer: MKS Model: ELITE-600HA-01 - Request a Quotation
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Call for the best priceHanoi city: (024) 35.381.269
Danang city: (023) 63.747.711
Bac Ninh city: (0222)730.39.68
HCM city: (028) 38.119.636
Frequency: 13.56 MHz ±0.005%
Dynamic Power Range: 1 - 600 W
Power Output: 600 W
Output Stability: -20 dBc
Accuracy: ±2 W (1-100 W), ±2% (101W - 600W)
Input AC Power: 110 - 253 VAC, Single phase, 50Hz/60Hz
RF Connector: Type N
Interface: 25 pin Analog, RS232
Remote Digital Interface: RS-232 via DB9F
Analog Interface: 25-pin DB25F
Cooling: Air-cooled
Operating Temperature: 5 - 40°C
AC Input Connector: IEC Compliant Inlet
LED Indicators: PWR and STAT on rear panel
Watts Nominal into 1.1:1: 600 W
Watts Nominal into 1.5:1: 600 W
Watts Nominal into 2:1: 486 W
Watts Nominal into 3:1: 384 W
Watts Nominal into inf:1: 200 W
Dimensions: 2U, full rack: 17 x 15 x 3.5 inches (WxDxH)
3U, half rack: 8.5 x 15 x 5.25 inches (WxDxH)
Weight: 9.2 kg
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