MKS ELITE-750FA-01 elite™ RF Plasma Generators (750W; 13.56MHz)
Manufacturer: MKS Model: ELITE-750FA-01 - Contact
See more: Equipment Calibration-Inspection & Repair Service
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Type: elite 13.56 MHz RF Plasma Generators
Frequency: 13.56 MHz ±0.005%
Dynamic Power Range: 1 - 750 W
Power Output: 750 W
Output Stability: -20 dBc
Accuracy: ±2 W (1-100 W), ±2% (101 - 750 W)
Input AC Power: 110 - 253 VAC, Single phase, 50Hz/60Hz
RF Connector: Type N
Interface: 25 pin Analog, RS232
Remote Digital Interface: RS-232 via DB9F
Analog Interface: 25-pin DB25F
Cooling: Air-cooled
Operating Temperature: 5 - 40°C
AC Input Connector: IEC Compliant Inlet
LED Indicators: PWR and STAT on rear panel
Watts Nominal into 1.1:1: 750 W
Watts Nominal into 1.5:1: 600 W
Watts Nominal into 2:1: 486 W
Watts Nominal into 3:1: 384 W
Watts Nominal into inf:1: 200 W
Dimensions: 2U, full rack: 17 x 15 x 3.5 inches (WxDxH)
Weight: 9.2 kg
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